Tungsten hexafluoride
Content introduction
1、 Product introduction
In the fluoride of tungsten, WF6 is stable and industrially produced. Tungsten hexafluoride is a colorless
An odorless gas or transparent liquid whose molecules have a symmetrical octahedral structure at room temperature. Tungsten hexafluoride is a strong fluoride agent, which can remove nickel
Monel alloy and stainless steel can fluoride many metals at room temperature. In the dry state, the corrosion to the glass is weak, but it can
Respond quickly. Tungsten hexafluoride reacts with ionic halides to form coordination compounds, which can be reduced to tungsten by hydrogen at high temperatures. Tungsten hexafluoride meets water
It hydrolyzes quickly to generate hydrogen fluoride (HF) and tungsten trioxide, so the toxicity of tungsten hexafluoride in the air is basically the same as HF.
Chinese name: tungsten hexafluoride | Molecular formula: WF6 |
英文名:Tungsten hexafluoride | Relative molecular weight: 297.8 |
CAS No:7783-82-6 | Hazard category: Class 2.3 toxic gas |
UN No:2196 | Solubility: soluble in most organic solvents |
熔点:2.3℃ | 沸点:17.2℃ |
临界温度:169.85℃ | 液体密度(水=1,15℃):3441kg/ m3 |
临界压力:4.27MPa | 气体密度(1atm,21℃):13.29kg/m3 |
2、 Technical indicators
Inspection items | index |
六氟化钨(v/v)% ≥ | 99.999 |
氮 ppmv ≤ | 1.0 |
氧 氩 ppmv ≤ | 0.5 |
一氧化碳 ppmv ≤ | 0.5 |
二氧化碳 ppmv ≤ | 0.5 |
四氟化碳 ppmv ≤ | 0.5 |
三氟化氮 ppmv ≤ | 0.5 |
六氟化硫 ppmv ≤ | 0.5 |
四氟化硅 ppmv ≤ | 0.5 |
总酸度(以HF计)ppmv ≤ | 5 |
3、 Packaging specification
Volume (L) | 10 | 20 | 40 |
Filling capacity (kg) | 12.5 | 25 | 50 |
Valve model | CGA638 | CGA638 | CGA638 |
Other specifications can be provided according to customer requirements.
4、 Application of tungsten hexafluoride
It is mainly used as the raw material of metal tungsten chemical vapor deposition (CVD) process in the electronic industry, especially the WSi2 made of it can be used
It is used as wiring material in large-scale integrated circuit (LSI). Composite coatings of tungsten and rhenium are prepared by CVD process of mixed metals, which can be used for X-ray
Emitting electrode. It can also be used as raw material of semiconductor electrode and conductive paste.
WF6 also has many non electronic applications. For example, through CVD technology, tungsten can generate hard tungsten carbide on the surface of steel, which can be used to improve steel
It can also be used to manufacture some tungsten parts, as fluorinating agent, polymerization catalyst and raw material of optical materials.
5、 Precautions
Emergency treatment for leakage: evacuate the personnel in the leakage contaminated area to the safe area quickly, prohibit irrelevant personnel from entering the contaminated area, and the emergency treatment personnel shall wear positive pressure
Self contained breathing apparatus, wear chemical protective clothing specially recommended by the manufacturer (completely isolated). Leak stoppage shall be conducted under the condition of ensuring safety. Spray mist slows down volatilization (or
Diffusion), but do not directly spray water on the leakage or leakage point. Do not allow water to enter the packaging container, pump and discharge (indoor) or strongly ventilate (outdoor).
The leaking container shall not be reused, and shall be subject to technical treatment to remove possible remaining gas. There is a cylinder inspection time on the cylinder neck, which does not meet the requirements
The steel cylinder shall be inspected by qualified pressure vessel inspection organization by entrusting suppliers such as Philips Special Gas. It is strictly prohibited to use expired cylinders.
6、 First aid measures
Skin contact: Take off contaminated clothes and wash with flowing water. Apply magnesium oxide glycerin ointment or dilute ammonia on the burn. Get medical attention.
Eye contact: immediately open the upper and lower eyelids, and immediately rinse thoroughly with a large amount of flowing water for at least 15 minutes. Get medical attention.
Inhalation: leave the site to a place with fresh air. Give oxygen when breathing is difficult. When breathing stops, perform artificial respiration immediately. Get medical attention immediately.
Ingestion: Rinse mouth with water, drink milk or egg white, and seek medical advice immediately.
Fire extinguishing method: foam, carbon dioxide and dry powder.