1、 Product introduction

Carbon tetrafluoride is a colorless, odorless, nonflammable and easily compressible gas at room temperature. It is a non-toxic substance with very stable properties and is insoluble in water,

It is a greenhouse gas. Carbon tetrafluoride is a plasma etching gas with large consumption in the microelectronics industry.

2、 Technical standards

3、 Packaging specification (steel cylinder, Y cylinder)

Other specifications can be provided according to customer requirements.

4、 Application of carbon tetrafluoride

Carbon tetrafluoride is a large amount of plasma etching gas in the microelectronic industry at present, which can be widely used in silicon, silicon dioxide, silicon nitride, phosphorus

Etching of silicon glass and tungsten film materials. Cleaning the surface of electronic devices, production of solar cells, laser technology, gas phase insulation, low temperature refrigeration

Leak testing agents, controlling the attitude of space rockets, detergents in printed circuit production are also widely used. Carbon tetrafluoride can also be used in metal metallurgy

It is sometimes used as a cryogenic coolant in the refining and plastic industries.

5、 Precautions

Store in a cool and ventilated warehouse. The warehouse temperature should not exceed 50 ℃. Keep away from kindling, heat source and direct sunlight. Should be compatible with flammable or

The fuel shall be stored separately. Handle with care to prevent damage to cylinders and accessories. In case of leakage, personnel in the contaminated area shall be evacuated quickly,

It is recommended that emergency personnel wear self-contained positive pressure respirators and general work clothes to cut off the leakage as much as possible

Leakage source, reasonable ventilation and accelerated diffusion. Leaking containers shall be properly treated and reused after repair and inspection. Carbon tetrafluoride is generally considered to be inert and non-toxic

In high concentration, it is an asphyxiant with less toxicity than carbon tetrachloride. Carbon tetrafluoride is a non corrosive gas, and all general materials such as steel and stainless steel

Steel, copper, bronze, aluminum and other metal materials can be used, but alloys containing more than 2% magnesium cannot be used. At high temperatures, some metals accelerate CF4

Catalysis of decomposition. In the order of catalytic growth, from small to large, they are arranged as follows: Inconel, austenitic stainless steel, nickel, steel

Aluminum, copper, bronze, brass, silver. PTFE, epoxy resin and acetate fiber can be used. Bottled gas products are high pressure filling gas, so that

The gas can be used only after being depressurized. When using the tail gas, the residual pressure in the bottle should be kept at 0.3MPa, which should not be less than 0.2MPa

For residual pressure, close the bottle valve to ensure gas quality and use safety. Do not expose the cylinder to the sun, throw it heavily or hit it. It is strictly prohibited to bake the cylinder with open fire and barbarism

Loading and unloading. There is a cylinder inspection time on the cylinder neck, and unqualified cylinders shall be entrusted to qualified pressure vessels by suppliers such as Philips Special Gas

The inspection unit conducts inspection. It is strictly prohibited to use expired cylinders.