1、 Product introduction

Silane is a colorless, toxic and very active compressed gas under normal temperature and pressure. Fire at room temperature and explode in air or halogen gas

Sexual combustion. That is, use other gases for dilution. If the concentration is not low enough, it can still spontaneously ignite. Silane is 2% in argon, 2.5% in nitrogen and 2.5% in hydrogen

At 1%, it can still catch fire. When the silane concentration is less than 1%, it will not burn, when it is greater than 3%, it will spontaneously burn, and when it is 1% ～ 3%, it may burn. Silane is a strong reducing agent

Metal halides react violently, react explosively with chlorine and bromine, and react violently with carbon tetrachloride. Therefore, Freon fire extinguishing agent cannot be used for silane.

Silane is insoluble in ethanol, ether, benzene, chloroform and silicon tetrachloride. It does not react with lubricating oil and fat. It is non corrosive to almost all metals. Sometimes,

Alkali in glass can also decompose silane. Silane dissolved in carbon disulfide can also explode when encountering air. Silane is widely used for epitaxial growth of silicon

Long, polycrystalline silicon, silicon oxide, silicon nitride and other raw materials, solar cells, optical fibers, colored glass manufacturing, chemical vapor deposition.

2、 Technical indicators

3、 Packaging specification (steel cylinder, Y cylinder)

Other specifications can be provided according to customer requirements.

4、 Application of Silane

High purity silane and high-purity ammonia are used together to produce solar thin film cells to attach silicon molecules to the cell surface

Used in the production of LOW-E coated glass together with high-purity ethylene

High purity silane is used as silicon source in epitaxial growth process of LSI

Applied to R&D and production of national defense and military industry

Silane also plays an important role in flat panel display production

For low-temperature silicon dioxide CVD and silicon nitride CVD

5、 Precautions

The workplace where silane is used shall be ventilated to keep the indoor air dry. The silane device shall be strictly sealed to avoid contact with air and water

In this case, the gas using device should be replaced with inert gas before use, and then vacuumized. In this way, the replacement and vacuumization should be repeated, and it must be thoroughly cleaned

Remove air and moisture from the system. After the device is used, the silane in the cleaning system shall also be replaced with inert gas. Helium leak detector can be used to detect leakage. less

When the amount of silane leaks, it can also be known from the folding of silicon oxide powder. The cylinder shall be stored in a cool, dry and well ventilated place, away from heat source, chlorine

Bromine and other oxidants. The workplace shall be equipped with adequate protective equipment and emergency supplies. Silane itself is non corrosive, and carbon steel, stainless steel, copper

Brass, monel, corrosion-resistant nickel base alloy, or polytetrafluoroethylene, polytrifluorochloroethylene polymer, nylon, trifluorochloroethylene resin, polyethylene

Ethylene, polyester and quartz glass shall not be used, such as lead, rubber, fat, lubricating oil and glass. Combustible organic polymer materials shall be avoided.

When a large amount of silane leaks, it will catch fire immediately, so it is impossible to use fire extinguishers to extinguish the fire, but the fire can be controlled to prevent the fire from spreading around.

The radiant heat during combustion is not too high, so the valve should be closed as far as possible to stop the outflow of gas. Use snowstone powder or graphite powder to extinguish the fire. Exhaust gas available

Water or alkali absorption, or burning into SiO2 in a special burner, and then catching with a special filter. Store in a cool and ventilated warehouse. Keep away from fire

Species and heat source. The warehouse temperature should not exceed 40 ℃. It shall be stored separately from inflammable (combustible) materials and oxidants, and mixed storage is strictly prohibited. The storage area shall be equipped with leakage emergency treatment

Equipment. Closed operation and local ventilation. The operators must be specially trained and strictly abide by the operating procedures. It is recommended that operators wear filter type anti lock

Gas mask (half mask). Keep away from inflammables and combustibles. Prevent gas leakage into the air of the workplace. Avoid contact with oxidants. Light loading during handling

Unload gently to prevent damage to the cylinder and accessories. There is a cylinder inspection time on the bottle neck of the cylinder, and the unqualified cylinder should be entrusted with the supply of special gas from Philips

The supplier shall go to a qualified pressure vessel inspection unit for inspection. It is strictly prohibited to use expired cylinders.

5、 Operating instructions for silane

Use a pressure reducer or an independent control valve to safely release silane from the cylinder. A check valve is used to prevent reverse flow. Do not use open flame or other nearby

A heat source that heats any part of a cylinder.

Use fire-proof tools. Do not attempt to repair, adjust, or otherwise modify cylinders containing silane.

The hydrogen ion detector is used to monitor the repair and diffusion of silane in the air, and the infrared/ultraviolet monitor is used to monitor the fire. All monitors shall

With internal lock, the silane gas source will be automatically cut off once problems are found.

In case of failure or other operation problems, please contact the distributor near * * * immediately.

Pressure filling valves are not allowed to be used in the silane system, and only non pressure filling membrane valves and bellows valves are allowed to be used. Overflow valves or

Over current switch. This can cut off the air source when the downstream pipeline explodes. The on-off valve shall be installed as close as possible to the air source. Avoid if possible

No one is required to operate the cylinder alone. All operations shall be carried out in this way. Once leakage occurs, emergency personnel can arrive immediately.

The monitoring system shall be equipped with standby or emergency power supply. There must be a remote emergency switch, and the silane gas source can be turned off if necessary.

Move the container with a suitable trolley to ensure that the gas cylinder is in a fixed state during the whole process of use. Tools (such as wrench, screwdriver,

Etc.) into the bonnet. Otherwise, it will damage the valve and cause leakage.

Once the cylinder is connected to the purged and passivated system, open the cylinder valve slowly and carefully. If the user has difficulty in operating the cylinder valve,

Stop using and contact the supplier.

Use an adjustable wrench to open an over tightened or rusted bonnet. All pipelines and related equipment are grounded. Electrical equipment must be flameproof and explosion-proof.