What are the main applications of high-purity sulfur hexafluoride
Published on:2018-10-16 Click:261High purity sulfur hexafluoride is usually used in circuit breakers, transformers and other electrical equipment. Its use can increase the safety of equipment operation, reduce the volume of equipment, and extend the service life of equipment. In recent years, the country has vigorously developed the basic power industry, bringing great market opportunities to sulfur hexafluoride manufacturers.
According to the consumption of high-purity sulfur hexafluoride in these years, Feilil estimates that the domestic demand for sulfur hexafluoride will reach a peak of 4000~4500 tons in the next two or three years, and will be stabilized at about 4000 tons from 2008 to 2010.
In addition, the domestic demand for high-purity sulfur hexafluoride (the purity is above 99.99%) is very strong, and the added value is high. It is mainly used as cleaning gas in semiconductor industry.
The cost of high-purity sulfur hexafluoride is only a fraction of that of NF3. In recent years, the new technology that companies replace NF3 as cleaning gas in CVD process with cheap SF6 is being widely studied. This technology not only greatly reduces the cost of CVD gas, which accounts for a considerable proportion in the processing of liquid crystal products, but also shows the environmental protection prospect of * * *. In recent years, the consumption has been significantly increased.
There are nearly 50 domestic production lines using Liming sulfur hexafluoride as etching gas, and 20 to 30 new lines are expected to be built in the next five years. The annual consumption of high-purity sulfur hexafluoride is about 600 tons. However, domestic high-purity sulfur hexafluoride products are far from meeting the market demand. Most of the high-purity products used by semiconductor manufacturers rely on imports, which provides more development opportunities for high-purity hexafluoride enterprises.
The content of the article comes from high-purity sulfur hexafluoride: http://www.feiliergas.com