Luoyang Filier Special Gas Co., Ltd
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What is the situation of high-purity sulfur hexafluoride in China

Published on:2018-06-04 Click:220

高纯六氟化硫在国内形势如何

  

High purity sulfur hexafluoride gas is a special gas urgently needed by many departments such as scientific research and production in China. It is used in plasma etching process in semiconductor industrial towel and as spacer dopant in optical fiber manufacturing. High purity SF6 gas is also an important laser material and has important applications in other fields.

In addition, high-purity sulfur hexafluoride is gaseous at room temperature and pressure, and is a high-pressure liquid after bottling. Colorless, odorless, non-toxic and nonflammable. It has good chemical stability and thermal stability.

High purity sulfur hexafluoride is mainly used as cleaning gas in semiconductor industry. The cost of sulfur hexafluoride is only a fraction of that of NF3. In recent years, the new technology that companies replace NF3 as cleaning gas in CVD process with cheap SF6 is being widely studied.

This technology not only greatly reduces the cost of CVD gas, which accounts for a considerable proportion in the processing of liquid crystal products, but also shows the environmental protection prospect of * * *. In recent years, the consumption has been significantly increased.

It can be seen that in recent years, Liming sulfur hexafluoride has increasingly shown its importance in many production technology fields. High purity sulfur hexafluoride (purity above 99.99%) has strong domestic demand and high added value.

The content of the article comes from high-purity sulfur hexafluoride: www.feiriergas.com/


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