Luoyang Filier Special Gas Co., Ltd
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Industrial application and future development of high purity sulfur hexafluoride

Published on:2017-11-14 Click:239

高纯六氟化硫工业应用及未来发展

  Industrial grade high purity sulfur hexafluoride is mainly used in circuit breakers,transformers and other electrical equipment.The use of sulfur hexafluoride can increase the safety of equipment operation,reduce the size of equipment,and extend the life of equipment.In recent years,the country has vigorously developed the basic power industry,which has brought great market opportunities to sulfur hexafluoride manufacturers.It is mainly used for cleaning gas in semiconductor industry.In addition,high purity sulfur hexafluoride(purity above 99.99%),domestic demand is very strong,and high added value.

  The cost of high-purity sulfur hexafluoride is only a fraction of that of NF3.In recent years,new technologies for companies to replace NF3 as a cleaning gas in previous CVD processes with cheap SF6 are being widely studied.This technology has greatly reduced the cost of CVD gas,which accounts for a considerable proportion in the processing of liquid crystal products,and also shows the prospect of environmental protection.In recent years,the consumption of CVD gas has been significantly increased.China becomes the world's second largest integrated circuit market after the United States,total demand is about$50 billion.

  At present,there are about 50 production lines using Dawn sulfur hexafluoride as etching gas in China.Between 20 and 30 new lines are expected to be built in the next few years.The annual consumption is about 600 tons.While the domestic high purity products are far from meeting the market demand,most of the high purity products used by semiconductor manufacturers rely on imports,which provides more development opportunities for hexafluoride enterprises.

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